Alfred Grill: search on Z-Library

The world's largest scientific articles store. 70,000,000+ articles for free.

Don't use scam websites

1

Diamond-like carbon: state of the art

Journal:

Diamond and Related Materials

Year:

1999

Language:

english

File:

PDF, 161 KB

english, 1999

2

Sputtered silicon nitride coatings for wear protection

Alfred Grill, Paul R. Aron

Journal:

Thin Solid Films

Year:

1982

Language:

english

File:

PDF, 344 KB

english, 1982

3

Some properties of r.f.-sputtered hafnium nitride coatings

Paul R. Aron, Alfred Grill

Journal:

Thin Solid Films

Year:

1982

Language:

english

File:

PDF, 262 KB

english, 1982

4

Porous pSiCOH Ultralow- k Dielectrics for Chip Interconnects Prepared by PECVD

Journal:

Annual Review of Materials Research

Year:

2009

Language:

english

File:

PDF, 525 KB

english, 2009

5

Stresses in diamond-like carbon films

Grill, Alfred, Patel, Vishnubhai

Journal:

Diamond and Related Materials

Year:

1993

Language:

english

File:

PDF, 493 KB

english, 1993

6

Plasma enhanced chemical vapor deposited SiCOH dielectrics: from low-k to extreme low-k interconnect materials

Journal:

Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 340 KB

english, 2003

7

Fabrication of multilayer ferroelectric films

Neumayer, Deborah A., Duncombe, Peter R., Laibowitz, Robert B., Shaw, Thomas, Berndt, Lisa, Black, C. T., Grill, Alfred

Journal:

Integrated Ferroelectrics

Year:

1999

Language:

english

File:

PDF, 363 KB

english, 1999

8

Growth of bismuth titanate films by chemical vapor deposition and chemical solution deposition

Neumayer, Deborah A., Duncombe, Peter R., Laibowitz, Robert B., Shaw, Thomas, Purtell, Robert, Grill, Alfred

Journal:

Integrated Ferroelectrics

Year:

1998

Language:

english

File:

PDF, 417 KB

english, 1998

9

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Ultrathin (5-35 nm) SiCNH Dielectrics for Damascene Cu Cap Application: Thickness Scaling and Oxidation Barrier Performance Limitation

Nguyen, Son V., Haigh Jr., Thomas, Shaw, Thomas, Molis, Steven, Dziobkowski, Chet, Zahakos, C., Cohen, Steve, Shobha, Hosadurga, Liniger, E., Hu, C. K., Bonilla, Griselda, Klymko, Nancy, Grill, Alfred

Year:

2010

Language:

english

File:

PDF, 518 KB

english, 2010

10

ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Robust Ultrathin (20-25 nm)Trilayer Dielectric Low k Cu Damascene Cap for Sub-30 nm Nanoelectric Devices

Nguyen, Son V., Haigh Jr., Thomas, Tagami, Masayoshi, Grill, Alfred, Cohen, Stephan, Shobha, Hosadurga, Hu, Chao-Kun, Adams, Ed, Liniger, Eric, Shaw, Thomas, Cheng, Tien, Yusuff, Hakeem, Xu, Yiheng, K

Year:

2012

Language:

english

File:

PDF, 559 KB

english, 2012

11

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Advances in Resist Technology and Processing XX - Hardmask technology for sub-100 nm lithographic imaging

Babich, Katherina, Mahorowala, Arpan P., Medeiros, David R., Pfeiffer, Dirk, Petrillo, Karen E., Angelopoulos, Marie, Grill, Alfred, Patel, Vishnubhai, Halle, Scott, Brunner, Timothy A., Conti, Richar

Year:

2003

Language:

english

File:

PDF, 1.24 MB

english, 2003

12

Silane Decomposition on Cu Interconnects Inhibited by Ammonia

Ryan, E. Todd, Molis, Steven, Grill, Alfred

Journal:

Journal of The Electrochemical Society

Year:

2010

Language:

english

File:

PDF, 120 KB

english, 2010

13

Chemical solution deposition of BaSrTiO 3 films

Neumayer, Deborah A., Duncombe, Peter R., Laibowitz, Robert B., Grill, Alfred

Journal:

Integrated Ferroelectrics

Year:

1997

Language:

english

File:

PDF, 757 KB

english, 1997

14

Effect of TiO x nucleation layer on crystallization of Bi 4 Ti 3 O 12 films

Neumayer, Deborah A., Duncombe, Peter R., Laibowitz, Robert B., Saenger, Katherine L., Purtell, Robert, Ott, John A., Shaw, Thomas M., Grill, Alfred

Journal:

Integrated Ferroelectrics

Year:

1997

Language:

english

File:

PDF, 876 KB

english, 1997

15

SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH

Zhang, Xiaoxian, Myers, John N., Huang, Huai, Shobha, Hosadurga, Chen, Zhan, Grill, Alfred

Journal:

Journal of Applied Physics

Year:

2016

Language:

english

File:

PDF, 2.10 MB

english, 2016

16

Advanced single precursor based pSiCOH k = 2.4 for ULSI interconnects

Priyadarshini, Deepika, Nguyen, Son V., Shobha, Hosadurga, Liniger, Eric, Chen, James H.-C., Huang, Huai, Cohen, Stephan A., Grill, Alfred

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2017

Language:

english

File:

PDF, 1.02 MB

english, 2017

17

SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH: Reactive ion etching and dielectric recovery

Myers, John N., Zhang, Xiaoxian, Huang, Huai, Shobha, Hosadurga, Grill, Alfred, Chen, Zhan

Journal:

Applied Physics Letters

Year:

2017

Language:

english

File:

PDF, 1.10 MB

english, 2017

18

Extreme-low k porous pSiCOH dielectrics prepared by PECVD

You, Han, Mennell, Petra, Shoudy, Matthew, Sil, Devika, Dorman, Donald, Cohen, Stephan, Liniger, Eric, Shaw, Thomas, Leo, Tsong-Lin, Canaperi, Donald, Raymond, Mark, Madan, Anita, Grill, Alfred

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2018

Language:

english

File:

PDF, 1.72 MB

english, 2018

19

Macrosegregation in strand cast steel: Computation of concentration profiles with a diffusion model

Tacke, Karl-Hermann, Grill, Alfred, Miyazawa, Ken-ichi, Schwerdtfeger, Klaus

Journal:

Archiv für das Eisenhüttenwesen

Year:

1981

Language:

english

File:

PDF, 508 KB

english, 1981

20

Cold Plasma Materials Fabrication || About the Author

Year:

1994

File:

PDF, 4 KB

1994

21

Cold Plasma Materials Fabrication || Fundamentals of Plasma

Year:

1994

Language:

english

File:

PDF, 6.09 MB

english, 1994

22

How to restore superlow friction of DLC: the healing effect of hydrogen gas

Julien Fontaine, Michel Belin, Thierry Le Mogne, Alfred Grill

Journal:

Tribology International

Year:

2004

Language:

english

File:

PDF, 639 KB

english, 2004

23

Fluorinated diamond-like carbon protective coating for magnetic recording media devices

Journal:

Journal of Fluorine Chemistry

Year:

1998

Language:

english

File:

PDF, 62 KB

english, 1998

24

Niobium as mint metal: Production–properties–processing

Robert Grill, Alfred Gnadenberger

Journal:

International Journal of Refractory Metals and Hard Materials

Year:

2006

Language:

english

File:

PDF, 498 KB

english, 2006

25

Epitaxial Graphene Nanoribbon Array Fabrication Using BCP-Assisted Nanolithography

Liu, Guanxiong, Wu, Yanqing, Lin, Yu-Ming, Farmer, Damon B., Ott, John A., Bruley, John, Grill, Alfred, Avouris, Phaedon, Pfeiffer, Dirk, Balandin, Alexander A., Dimitrakopoulos, Christos

Journal:

Year:

2012

Language:

english

File:

PDF, 3.27 MB

english, 2012

26

Picosecond optical studies of amorphous diamond and diamondlike carbon: Thermal conductivity and longitudinal sound velocity

Morath, Christopher J., Maris, Humphrey J., Cuomo, Jerome J., Pappas, David L., Grill, Alfred, Patel, Vishnubhai V., Doyle, James P., Saenger, Katherine L.

Journal:

Journal of Applied Physics

Year:

1994

Language:

english

File:

PDF, 872 KB

english, 1994

27

Structure of low dielectric constant to extreme low dielectric constant SiCOH films: Fourier transform infrared spectroscopy characterization

Grill, Alfred, Neumayer, Deborah A.

Journal:

Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 401 KB

english, 2003

28

Effect of SiC wafer miscut angle on the morphology and Hall mobility of epitaxially grown graphene

Dimitrakopoulos, Christos, Grill, Alfred, McArdle, Timothy J., Liu, Zihong, Wisnieff, Robert, Antoniadis, Dimitri A.

Journal:

Applied Physics Letters

Year:

2011

Language:

english

File:

PDF, 881 KB

english, 2011

29

Fabrication of an electrical spin transport device utilizing a diazonium salt/hafnium oxide interface layer on epitaxial graphene grown on 6âH-SiC(0001)

Abel, Joseph, Matsubayashi, Akitomo, Murray, Thomas, Dimitrakopoulos, Christos, Farmer, Damon B., Afzali, Ali, Grill, Alfred, Sung, C. Y., LaBella, Vincent P.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2012

Language:

english

File:

PDF, 1.16 MB

english, 2012

30

[IEEE 2011 IEEE/MTT-S International Microwave Symposium - MTT 2011 - Baltimore, MD, USA (2011.06.5-2011.06.10)] 2011 IEEE MTT-S International Microwave Symposium - Electrical characterization of wafer-scale epitaxial graphene and its RF applications

Lin, Yu-Ming, Jenkins, Keith A., Ott, John, Dimitrakopoulos, Christos, Farmer, Damon B., Wu, Yanqing, Grill, Alfred, Avouris, Phaedon

Year:

2011

Language:

english

File:

PDF, 649 KB

english, 2011

31

[IEEE 2014 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2014.5.19-2014.5.21)] 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) - CD-SEM metrology evaluation of gate-all-around Si nanowire MOSFET with improved control of nanowire suspension by using a buried boron nitride etch-stop layer

Cohen, Guy M., Shi, Leathen, Bangsaruntip, Sarunya, Grill, Alfred, Neumayer, Deborah, Levi, Shimon, Weinberg, Yakov, Shoval, Ori, Adan, Ofer, Tzi, Maayan Bar, Conley, Amiad

Year:

2014

Language:

english

File:

PDF, 800 KB

english, 2014

32

ECS Transactions [ECS 217th ECS Meeting - Vancouver, Canada (April 25 - April 30, 2010)] - Graphene RF Transistor Performance

Jenkins, Keith A., Lin, Yu-ming, Farmer, Damon, Dimitrakopoulos, Christos, Chiu, Hsin-Ying, Valdes-Garcia, Alberto, Avouris, Phaedon, Grill, Alfred

Year:

2010

Language:

english

File:

PDF, 444 KB

english, 2010

33

Wafer-scale epitaxial graphene growth on the Si-face of hexagonal SiC (0001) for high frequency transistors

Dimitrakopoulos, Christos, Lin, Yu-Ming, Grill, Alfred, Farmer, Damon B., Freitag, Marcus, Sun, Yanning, Han, Shu-Jen, Chen, Zhihong, Jenkins, Keith A., Zhu, Yu, Liu, Zihong, McArdle, Timothy J., Ott,

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2010

Language:

english

File:

PDF, 929 KB

english, 2010

34

Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects—State of the art

Grill, Alfred, Gates, Stephen M., Ryan, Todd E., Nguyen, Son V., Priyadarshini, Deepika

Journal:

Applied Physics Reviews

Year:

2014

Language:

english

File:

PDF, 3.33 MB

english, 2014

35

Effect of low-frequency radio frequency on plasma-enhanced chemical vapor deposited ultra low-κ dielectric films for very large-scale integrated interconnects

Todd Ryan, E., Gates, Stephen M., Cohen, Stephan A., Ostrovski, Yuri, Adams, Ed, Virwani, Kumar, Grill, Alfred

Journal:

Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 6.20 MB

english, 2014

36

Multilayer epitaxial graphene formed by pyrolysis of polycrystalline silicon-carbide grown on c-plane sapphire substrates

McArdle, Timothy J., Chu, Jack O., Zhu, Yu, Liu, Zihong, Krishnan, Mahadevaiyer, Breslin, Christopher M., Dimitrakopoulos, Christos, Wisnieff, Robert, Grill, Alfred

Journal:

Applied Physics Letters

Year:

2011

Language:

english

File:

PDF, 1.27 MB

english, 2011

37

Nanoindentation Analysis of Mechanical Properties of Low to Ultralow Dielectric Constant SiCOH Films

Wang, Lugen, Ganor, M., Rokhlin, S.I., Grill, Alfred

Journal:

Journal of Materials Research

Year:

2005

Language:

english

File:

PDF, 3.61 MB

english, 2005

38

Metal-catalyzed graphitization in Ni-C alloys and amorphous-C/Ni bilayers

Saenger, Katherine L., Lavoie, Christian, Carruthers, Roy, Bol, Ageeth A., Mcardle, Timothy J., Chu, Jack O., Tsang, James C., Grill, Alfred

Journal:

MRS Proceedings

Year:

2011

Language:

english

File:

PDF, 363 KB

english, 2011

39

Comparison of the Fracture Behavior of Brittle ILD Films used in the BEOL in Dry and Wet Environment using Nanoindentation

Simonyi, Eva, Lane, Michael, Liniger, Erik, Grill, Alfred

Journal:

MRS Proceedings

Year:

2006

Language:

english

File:

PDF, 1.30 MB

english, 2006

40

Line Resistance and Electromigration Variations Induced by Hydrogen-Based Plasma Modifications to the Silicon Carbonitride/Copper Interface

Ryan, E. Todd, Martin, Jeremy, Bonilla, Griselda, Molis, Steven, Spooner, Terry, Widodo, Johnny, Kim, Jae-Hak, Liniger, Eric, Grill, Alfred, Hu, C.-K.

Journal:

Journal of The Electrochemical Society

Year:

2007

Language:

english

File:

PDF, 259 KB

english, 2007

41

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Metrology, Inspection, and Process Control for Microlithography XXIX - Induced e-beam charge impact on spatial orientation of gate-all-around silicon wires device fabricated on boron nitride substrate

Cain, Jason P., Sanchez, Martha I., Levi, Shimon, Chirko, Konstantin, Adan, Ofer, Cohen, Guy, Bangsaruntip, Sarunya, Shi, Leathen, Grill, Alfred, Neumayer, Deborah

Year:

2015

Language:

english

File:

PDF, 7.17 MB

english, 2015

42

SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Emerging Lithographic Technologies V - Tunable antireflective coatings with built-in hard mask properties facilitating thin-resist processing

Mahorowala, Arpan P., Babich, Katherina, Petrillo, Karen E., Simons, John P., Angelopoulos, Marie, Patel, Vishnubhai, Grill, Alfred, Halle, Scott, Conti, Richard, Wu, ChungHsi J., Wise, Richard, Chen,

Year:

2001

Language:

english

File:

PDF, 880 KB

english, 2001

43

Bottom Electrode Effects in Controlling Orientation of Lead Zirconate Titanate Films Deposited by Chemical Solution Deposition

Neumayer, Deborah A., Saenger, Katherine L., Laibowitz, Robert B., Shaw, Thomas M., Mih, Rebecca, Grill, Alfred

Journal:

MRS Proceedings

Year:

1999

Language:

english

File:

PDF, 366 KB

english, 1999

44

Electrode Structures for Integration of Ferroelectric or High Dielectric Constant Films in Semiconductor Devices

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 1.24 MB

english, 1998

45

Novel Low-k Dual-phase Materials Prepared by PECVD

Grill, Alfred, Patel, Vishnubhai

Journal:

MRS Proceedings

Year:

2000

Language:

english

File:

PDF, 207 KB

english, 2000

46

SPIE Proceedings [SPIE Integrated Optoelectronic Devices 2004 - San Jose, CA, United States (Monday 26 January 2004)] Semiconductor Photodetectors - High-speed lateral PIN photodiodes in silicon technologies

Schaub, Jeremy D., Linden, Kurt J., Dereniak, Eustace L., Koester, Steven J., Dehlinger, Gabriel, Ouyang, Q. Christine, Guckenberger, Drew, Yang, Min, Rogers, Dennis L., Chu, Jack, Grill, Alfred

Year:

2004

Language:

english

File:

PDF, 358 KB

english, 2004

47

PECVD low and ultralow dielectric constant materials: From invention and research to products

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2016

Language:

english

File:

PDF, 2.35 MB

english, 2016

48

Cold Plasma Materials Fabrication || Plasma Diagnostics

Year:

1994

File:

PDF, 4 KB

1994

49

Cold Plasma Materials Fabrication || Cold Plasma Generation

Year:

1994

File:

PDF, 4 KB

1994

50

Cold Plasma Materials Fabrication || Cold Plasma Processes for Surface Modification

Year:

1994

File:

PDF, 4 KB

1994